Secondary Neutral Mass Spectrometer
System INA-X


system Features:
  • Detection limit down to 1 ppm
  • High depth resolution in the nm regime (≤ 2 nm)
  • Analysis of conduction and insulating materials
  • Simple quantification of sample composition

Plasma/Sputter Parameters:


Type: ECWR Plasma, 27 MHz
Pressure: 5·10-5 - 5·10-3 mbar
Ion Energy: 100 eV - 2 keV
Used gas: typically gases (Ar, Ne, Kr, Xe)
Sputter Modes: Direct Bombardment Mode (DBM) and High Frequency Mode (HFM)
Typical Sputter Rates: 1 nm/s @ 130 eV Ion Energy, 10 nm/s @ 1keV Ion Energy
Sputter Diameter: 0.3 - 14 mm
Post Ionisation Efficiency: 1%

Detection:


Ion Optics: 45° spherical sector analyser
Mass Spectrometer: Balzers QMG 422, differentially pumped
Mass Range: 0- 340 amu
Detector: Secondary Electron Multiplier (SEM), Single Ion Counting
Detection angle: 30°
Detection Limit: < 1 ppm
Detection Sensitivity: 5 - 10 cps/ppm
Depth Resolution: ≤ 2 nm
Background Level: ≤ 5 cps
Operation Pressure: 5·10-5 - 5·10-3 mbar
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